JAPAN - TOYAKU

TOYAMA KENRITSU UNIVERSITY

Kosugi, Toyama, 939-0398

Telephone: +81 766 56 7500
Telefax: +81 766 56 8020
E-mail: matumoto@pu-toyama.ac.jp
URL:   http://www.pu-toyama.ac.jp

Faculty of Engineering, Department of Electronics and Informatics
Matsumoto, Kazunori

Research activities:
Plasma production fully confined in advanced multi-pole magnetic field by using poly-phase ac electric source and its applications for multi-magnetron sputter coating, high intensity ultra-violet irradiation lamp and plasma sterilizer.


IAEA 2001
2001-10-31