|
Measurement of EEDF and Distribution of Primary Electron
in a Bucket Ion Source
S. Miyamoto, F. Kanayama, T. Minami, T. Mune, and H. Horiike
Grad. Sch. Eng., Osaka Univ. 2-1 Yamadaoka, Suita, Osaka, 565-0871, Japan
Abstract: Recently, a lot of effort is put into producing negative hydrogen ion by using bucket type ion
sources. The key issue in the production of negative hydrogen ion is to control primary
electron penetration in the production region in which negative ion is produced. We developed
an EEDF (electron energy distribution function) measurement system to investigate the
primary electron distribution in ion sources.
|
Synopsis (pdf)